ASML, the world's top chip equipment maker, on Monday said South Korea's Samsung Electronics would invest 276 million euros ($345.5 million) in its research into costly next-generation chipmaking technology.
Samsung will also pay 503 million euros for a 3 per cent equity stake in ASML.
ASML, based in the Netherlands, has already signed up Intel Corp and TSMC in recent weeks with similar deals to fund and fast-track its research.
In July, the Dutch company said it had approached its three biggest customers - Intel, TSMC, and Samsung Electronics - to help fund its R&D and invest in up to 25 per cent of its shares.
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